7/14/2011	10:05:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/14/2011	10:05:03 AM	Recipe started at 10:05 AM
7/14/2011	10:05:03 AM	Helium valve closed
7/14/2011	10:05:03 AM	H2 valve closed
7/14/2011	10:05:03 AM	BCl3 valve closed
7/14/2011	10:05:03 AM	PH3 valve closed
7/14/2011	10:05:03 AM	SiCl4 pre valve closed
7/14/2011	10:05:03 AM	SiCl4 post valve closed
7/14/2011	10:05:03 AM	Main Vac valve closed
7/14/2011	10:05:03 AM	Bypass valve closed
7/14/2011	10:05:03 AM	Bubbler valve closed
7/14/2011	10:05:03 AM	Helium MFC set to  0.000000
7/14/2011	10:05:03 AM	H2 MFC set to  0.000000
7/14/2011	10:05:03 AM	BCl3 MFC set to  0.000000
7/14/2011	10:05:03 AM	PHl3 MFC set to  0.000000
7/14/2011	10:05:03 AM	SiCl4 MFC set to  0.000000
7/14/2011	10:05:03 AM	Bypass solenoid MFC set to  0.000000
7/14/2011	10:05:03 AM	Tube furnace set to 0
7/14/2011	10:05:06 AM	H2 valve closed
7/14/2011	10:05:06 AM	BCl3 valve closed
7/14/2011	10:05:06 AM	PH3 valve closed
7/14/2011	10:05:06 AM	SiCl4 pre valve closed
7/14/2011	10:05:06 AM	SiCl4 post valve closed
7/14/2011	10:05:06 AM	Main Vac valve closed
7/14/2011	10:05:06 AM	Bypass valve closed
7/14/2011	10:05:06 AM	Bubbler valve closed
7/14/2011	10:05:06 AM	Helium valve opened
7/14/2011	10:05:06 AM	Helium MFC set to  500.000000
7/14/2011	10:05:06 AM	H2 MFC set to  0.000000
7/14/2011	10:05:06 AM	BCl3 MFC set to  0.000000
7/14/2011	10:05:06 AM	PHl3 MFC set to  0.000000
7/14/2011	10:05:06 AM	SiCl4 MFC set to  0.000000
7/14/2011	10:05:06 AM	Bypass solenoid MFC set to  0.000000
7/14/2011	10:05:06 AM	Tube furnace set to 0
7/14/2011	10:06:07 AM	Helium valve closed
7/14/2011	10:06:07 AM	H2 valve closed
7/14/2011	10:06:07 AM	BCl3 valve closed
7/14/2011	10:06:07 AM	PH3 valve closed
7/14/2011	10:06:07 AM	SiCl4 pre valve closed
7/14/2011	10:06:07 AM	SiCl4 post valve closed
7/14/2011	10:06:07 AM	Main Vac valve closed
7/14/2011	10:06:07 AM	Bypass valve closed
7/14/2011	10:06:07 AM	Bubbler valve closed
7/14/2011	10:06:07 AM	Helium MFC set to  0.000000
7/14/2011	10:06:07 AM	H2 MFC set to  0.000000
7/14/2011	10:06:07 AM	BCl3 MFC set to  0.000000
7/14/2011	10:06:07 AM	PHl3 MFC set to  0.000000
7/14/2011	10:06:07 AM	SiCl4 MFC set to  0.000000
7/14/2011	10:06:07 AM	Bypass solenoid MFC set to  0.000000
7/14/2011	10:06:07 AM	Tube furnace set to 0
7/14/2011	10:06:08 AM	Run finished at 10:06 AM
7/14/2011	10:06:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/14/2011	10:18:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2011	10:18:14 AM	Recipe started at 10:18 AM
7/14/2011	10:18:14 AM	Helium valve closed
7/14/2011	10:18:14 AM	H2 valve closed
7/14/2011	10:18:14 AM	BCl3 valve closed
7/14/2011	10:18:14 AM	PH3 valve closed
7/14/2011	10:18:14 AM	SiCl4 pre valve closed
7/14/2011	10:18:14 AM	SiCl4 post valve closed
7/14/2011	10:18:14 AM	Main Vac valve closed
7/14/2011	10:18:14 AM	Bubbler valve closed
7/14/2011	10:18:14 AM	Bypass valve opened
7/14/2011	10:18:14 AM	Helium MFC set to  0.000000
7/14/2011	10:18:14 AM	H2 MFC set to  0.000000
7/14/2011	10:18:14 AM	BCl3 MFC set to  0.000000
7/14/2011	10:18:14 AM	PHl3 MFC set to  0.000000
7/14/2011	10:18:14 AM	SiCl4 MFC set to  0.000000
7/14/2011	10:18:14 AM	Bypass solenoid MFC set to  0.000000
7/14/2011	10:18:14 AM	Tube furnace set to 0
7/14/2011	10:19:19 AM	Helium valve closed
7/14/2011	10:19:19 AM	H2 valve closed
7/14/2011	10:19:19 AM	BCl3 valve closed
7/14/2011	10:19:19 AM	PH3 valve closed
7/14/2011	10:19:19 AM	SiCl4 pre valve closed
7/14/2011	10:19:19 AM	SiCl4 post valve closed
7/14/2011	10:19:19 AM	Main Vac valve closed
7/14/2011	10:19:19 AM	Bubbler valve closed
7/14/2011	10:19:19 AM	Bypass valve opened
7/14/2011	10:19:19 AM	Helium MFC set to  0.000000
7/14/2011	10:19:19 AM	H2 MFC set to  0.000000
7/14/2011	10:19:19 AM	BCl3 MFC set to  0.000000
7/14/2011	10:19:19 AM	PHl3 MFC set to  0.000000
7/14/2011	10:19:19 AM	SiCl4 MFC set to  0.000000
7/14/2011	10:19:19 AM	Bypass solenoid MFC set to  0.000000
7/14/2011	10:19:19 AM	Tube furnace set to 0
7/14/2011	10:19:45 AM	Helium valve closed
7/14/2011	10:19:45 AM	H2 valve closed
7/14/2011	10:19:45 AM	BCl3 valve closed
7/14/2011	10:19:45 AM	PH3 valve closed
7/14/2011	10:19:45 AM	SiCl4 pre valve closed
7/14/2011	10:19:45 AM	SiCl4 post valve closed
7/14/2011	10:19:45 AM	Bypass valve closed
7/14/2011	10:19:45 AM	Bubbler valve closed
7/14/2011	10:19:45 AM	Main Vac valve opened
7/14/2011	10:19:45 AM	Helium MFC set to  0.000000
7/14/2011	10:19:45 AM	H2 MFC set to  0.000000
7/14/2011	10:19:45 AM	BCl3 MFC set to  0.000000
7/14/2011	10:19:45 AM	PHl3 MFC set to  0.000000
7/14/2011	10:19:45 AM	SiCl4 MFC set to  0.000000
7/14/2011	10:19:45 AM	Bypass solenoid MFC set to  0.000000
7/14/2011	10:19:45 AM	Tube furnace set to 0
7/14/2011	10:19:46 AM	Run finished at 10:19 AM
7/14/2011	10:19:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2011	10:20:13 AM	Helium MFC set to  20.000000
7/14/2011	10:20:15 AM	Helium valve opened
7/14/2011	10:20:34 AM	Helium MFC set to  50.000000
7/14/2011	10:20:43 AM	Helium MFC set to  20.000000
7/14/2011	10:20:47 AM	Helium valve closed
7/14/2011	10:21:20 AM	Helium valve opened
7/14/2011	10:21:37 AM	Helium valve closed
7/14/2011	10:24:29 AM	Helium valve opened
7/14/2011	10:25:32 AM	Helium valve closed
7/14/2011	10:26:05 AM	Helium valve opened
7/14/2011	10:27:01 AM	Helium valve closed
7/14/2011	10:27:35 AM	Helium valve opened
7/14/2011	10:29:06 AM	Helium valve closed
7/14/2011	10:29:33 AM	Main Vac valve closed
7/14/2011	10:29:47 AM	Main Vac valve opened
7/14/2011	10:29:51 AM	Helium valve opened
7/14/2011	10:31:26 AM	Helium valve closed
7/14/2011	11:18:01 AM	Main Vac valve closed
7/14/2011	11:18:11 AM	Main Vac valve opened
7/14/2011	11:19:59 AM	Recipe started at 11:19 AM
7/14/2011	11:19:59 AM	Helium valve closed
7/14/2011	11:19:59 AM	H2 valve closed
7/14/2011	11:19:59 AM	BCl3 valve closed
7/14/2011	11:19:59 AM	PH3 valve closed
7/14/2011	11:19:59 AM	SiCl4 pre valve closed
7/14/2011	11:19:59 AM	SiCl4 post valve closed
7/14/2011	11:19:59 AM	Main Vac valve closed
7/14/2011	11:19:59 AM	Bypass valve closed
7/14/2011	11:19:59 AM	Bubbler valve closed
7/14/2011	11:19:59 AM	Helium MFC set to  0.000000
7/14/2011	11:19:59 AM	H2 MFC set to  0.000000
7/14/2011	11:19:59 AM	BCl3 MFC set to  0.000000
7/14/2011	11:19:59 AM	PHl3 MFC set to  0.000000
7/14/2011	11:19:59 AM	SiCl4 MFC set to  0.000000
7/14/2011	11:19:59 AM	Bypass solenoid MFC set to  0.000000
7/14/2011	11:20:00 AM	Tube furnace set to 0
7/14/2011	11:20:03 AM	Helium valve closed
7/14/2011	11:20:03 AM	BCl3 valve closed
7/14/2011	11:20:03 AM	PH3 valve closed
7/14/2011	11:20:03 AM	SiCl4 pre valve closed
7/14/2011	11:20:03 AM	SiCl4 post valve closed
7/14/2011	11:20:03 AM	Main Vac valve closed
7/14/2011	11:20:03 AM	Bypass valve closed
7/14/2011	11:20:03 AM	Bubbler valve closed
7/14/2011	11:20:03 AM	H2 valve opened
7/14/2011	11:20:03 AM	Helium MFC set to  0.000000
7/14/2011	11:20:03 AM	H2 MFC set to  500.000000
7/14/2011	11:20:03 AM	BCl3 MFC set to  0.000000
7/14/2011	11:20:03 AM	PHl3 MFC set to  0.000000
7/14/2011	11:20:03 AM	SiCl4 MFC set to  0.000000
7/14/2011	11:20:03 AM	Bypass solenoid MFC set to  0.000000
7/14/2011	11:20:03 AM	Tube furnace set to 0
7/14/2011	11:21:09 AM	Helium valve closed
7/14/2011	11:21:09 AM	BCl3 valve closed
7/14/2011	11:21:09 AM	PH3 valve closed
7/14/2011	11:21:09 AM	SiCl4 pre valve closed
7/14/2011	11:21:09 AM	SiCl4 post valve closed
7/14/2011	11:21:09 AM	Main Vac valve closed
7/14/2011	11:21:09 AM	Bypass valve closed
7/14/2011	11:21:09 AM	H2 valve opened
7/14/2011	11:21:09 AM	Bubbler valve opened
7/14/2011	11:21:09 AM	Helium MFC set to  0.000000
7/14/2011	11:21:09 AM	H2 MFC set to  500.000000
7/14/2011	11:21:09 AM	BCl3 MFC set to  0.000000
7/14/2011	11:21:09 AM	PHl3 MFC set to  0.000000
7/14/2011	11:21:09 AM	SiCl4 MFC set to  0.000000
7/14/2011	11:21:09 AM	Bypass solenoid MFC set to  0.000000
7/14/2011	11:21:09 AM	Tube furnace set to 0
7/14/2011	11:21:10 AM	Helium valve closed
7/14/2011	11:21:10 AM	BCl3 valve closed
7/14/2011	11:21:10 AM	PH3 valve closed
7/14/2011	11:21:10 AM	SiCl4 pre valve closed
7/14/2011	11:21:10 AM	SiCl4 post valve closed
7/14/2011	11:21:10 AM	Main Vac valve closed
7/14/2011	11:21:10 AM	Bypass valve closed
7/14/2011	11:21:10 AM	H2 valve opened
7/14/2011	11:21:10 AM	Bubbler valve opened
7/14/2011	11:21:10 AM	Helium MFC set to  0.000000
7/14/2011	11:21:10 AM	H2 MFC set to  500.000000
7/14/2011	11:21:10 AM	BCl3 MFC set to  0.000000
7/14/2011	11:21:10 AM	PHl3 MFC set to  0.000000
7/14/2011	11:21:10 AM	SiCl4 MFC set to  0.000000
7/14/2011	11:21:10 AM	Bypass solenoid MFC set to  0.000000
7/14/2011	11:21:10 AM	Tube furnace set to 1000
7/14/2011	11:41:10 AM	Helium valve closed
7/14/2011	11:41:10 AM	PH3 valve closed
7/14/2011	11:41:10 AM	Main Vac valve closed
7/14/2011	11:41:10 AM	Bypass valve closed
7/14/2011	11:41:10 AM	H2 valve opened
7/14/2011	11:41:10 AM	BCl3 valve opened
7/14/2011	11:41:10 AM	SiCl4 pre valve opened
7/14/2011	11:41:10 AM	SiCl4 post valve opened
7/14/2011	11:41:10 AM	Bubbler valve opened
7/14/2011	11:41:10 AM	Helium MFC set to  0.000000
7/14/2011	11:41:10 AM	H2 MFC set to  500.000000
7/14/2011	11:41:10 AM	BCl3 MFC set to  1.000000
7/14/2011	11:41:10 AM	PHl3 MFC set to  0.000000
7/14/2011	11:41:10 AM	SiCl4 MFC set to  50.000000
7/14/2011	11:41:10 AM	Bypass solenoid MFC set to  0.000000
7/14/2011	11:41:11 AM	Tube furnace set to 1000
7/14/2011	12:01:11 PM	Helium valve closed
7/14/2011	12:01:11 PM	BCl3 valve closed
7/14/2011	12:01:11 PM	PH3 valve closed
7/14/2011	12:01:11 PM	SiCl4 pre valve closed
7/14/2011	12:01:11 PM	SiCl4 post valve closed
7/14/2011	12:01:11 PM	Main Vac valve closed
7/14/2011	12:01:11 PM	Bypass valve closed
7/14/2011	12:01:11 PM	H2 valve opened
7/14/2011	12:01:11 PM	Bubbler valve opened
7/14/2011	12:01:11 PM	Helium MFC set to  0.000000
7/14/2011	12:01:11 PM	H2 MFC set to  500.000000
7/14/2011	12:01:11 PM	BCl3 MFC set to  0.000000
7/14/2011	12:01:11 PM	PHl3 MFC set to  0.000000
7/14/2011	12:01:11 PM	SiCl4 MFC set to  0.000000
7/14/2011	12:01:11 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	12:01:11 PM	Tube furnace set to 950
7/14/2011	12:04:11 PM	H2 valve closed
7/14/2011	12:04:11 PM	BCl3 valve closed
7/14/2011	12:04:11 PM	PH3 valve closed
7/14/2011	12:04:11 PM	SiCl4 pre valve closed
7/14/2011	12:04:11 PM	SiCl4 post valve closed
7/14/2011	12:04:11 PM	Main Vac valve closed
7/14/2011	12:04:11 PM	Bypass valve closed
7/14/2011	12:04:11 PM	Helium valve opened
7/14/2011	12:04:11 PM	Bubbler valve opened
7/14/2011	12:04:11 PM	Helium MFC set to  500.000000
7/14/2011	12:04:11 PM	H2 MFC set to  0.000000
7/14/2011	12:04:11 PM	BCl3 MFC set to  0.000000
7/14/2011	12:04:11 PM	PHl3 MFC set to  0.000000
7/14/2011	12:04:11 PM	SiCl4 MFC set to  0.000000
7/14/2011	12:04:11 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	12:04:11 PM	Tube furnace set to 900
7/14/2011	12:07:11 PM	H2 valve closed
7/14/2011	12:07:11 PM	BCl3 valve closed
7/14/2011	12:07:11 PM	PH3 valve closed
7/14/2011	12:07:11 PM	SiCl4 pre valve closed
7/14/2011	12:07:11 PM	SiCl4 post valve closed
7/14/2011	12:07:11 PM	Main Vac valve closed
7/14/2011	12:07:11 PM	Bypass valve closed
7/14/2011	12:07:11 PM	Helium valve opened
7/14/2011	12:07:11 PM	Bubbler valve opened
7/14/2011	12:07:11 PM	Helium MFC set to  500.000000
7/14/2011	12:07:11 PM	H2 MFC set to  0.000000
7/14/2011	12:07:11 PM	BCl3 MFC set to  0.000000
7/14/2011	12:07:11 PM	PHl3 MFC set to  0.000000
7/14/2011	12:07:11 PM	SiCl4 MFC set to  0.000000
7/14/2011	12:07:11 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	12:07:11 PM	Tube furnace set to 850
7/14/2011	12:10:11 PM	H2 valve closed
7/14/2011	12:10:11 PM	BCl3 valve closed
7/14/2011	12:10:11 PM	PH3 valve closed
7/14/2011	12:10:11 PM	SiCl4 pre valve closed
7/14/2011	12:10:11 PM	SiCl4 post valve closed
7/14/2011	12:10:11 PM	Main Vac valve closed
7/14/2011	12:10:11 PM	Bypass valve closed
7/14/2011	12:10:11 PM	Helium valve opened
7/14/2011	12:10:11 PM	Bubbler valve opened
7/14/2011	12:10:11 PM	Helium MFC set to  500.000000
7/14/2011	12:10:11 PM	H2 MFC set to  0.000000
7/14/2011	12:10:11 PM	BCl3 MFC set to  0.000000
7/14/2011	12:10:11 PM	PHl3 MFC set to  0.000000
7/14/2011	12:10:11 PM	SiCl4 MFC set to  0.000000
7/14/2011	12:10:11 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	12:10:11 PM	Tube furnace set to 800
7/14/2011	12:13:11 PM	H2 valve closed
7/14/2011	12:13:11 PM	BCl3 valve closed
7/14/2011	12:13:11 PM	PH3 valve closed
7/14/2011	12:13:11 PM	SiCl4 pre valve closed
7/14/2011	12:13:11 PM	SiCl4 post valve closed
7/14/2011	12:13:11 PM	Main Vac valve closed
7/14/2011	12:13:11 PM	Bypass valve closed
7/14/2011	12:13:11 PM	Helium valve opened
7/14/2011	12:13:11 PM	Bubbler valve opened
7/14/2011	12:13:11 PM	Helium MFC set to  500.000000
7/14/2011	12:13:11 PM	H2 MFC set to  0.000000
7/14/2011	12:13:11 PM	BCl3 MFC set to  0.000000
7/14/2011	12:13:11 PM	PHl3 MFC set to  0.000000
7/14/2011	12:13:11 PM	SiCl4 MFC set to  0.000000
7/14/2011	12:13:11 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	12:13:12 PM	Tube furnace set to 750
7/14/2011	12:16:12 PM	H2 valve closed
7/14/2011	12:16:12 PM	BCl3 valve closed
7/14/2011	12:16:12 PM	PH3 valve closed
7/14/2011	12:16:12 PM	SiCl4 pre valve closed
7/14/2011	12:16:12 PM	SiCl4 post valve closed
7/14/2011	12:16:12 PM	Main Vac valve closed
7/14/2011	12:16:12 PM	Bypass valve closed
7/14/2011	12:16:12 PM	Helium valve opened
7/14/2011	12:16:12 PM	Bubbler valve opened
7/14/2011	12:16:12 PM	Helium MFC set to  500.000000
7/14/2011	12:16:12 PM	H2 MFC set to  0.000000
7/14/2011	12:16:12 PM	BCl3 MFC set to  0.000000
7/14/2011	12:16:12 PM	PHl3 MFC set to  0.000000
7/14/2011	12:16:12 PM	SiCl4 MFC set to  0.000000
7/14/2011	12:16:12 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	12:16:12 PM	Tube furnace set to 0
7/14/2011	12:36:12 PM	Helium valve closed
7/14/2011	12:36:12 PM	H2 valve closed
7/14/2011	12:36:12 PM	BCl3 valve closed
7/14/2011	12:36:12 PM	PH3 valve closed
7/14/2011	12:36:12 PM	SiCl4 pre valve closed
7/14/2011	12:36:12 PM	SiCl4 post valve closed
7/14/2011	12:36:12 PM	Main Vac valve closed
7/14/2011	12:36:12 PM	Bypass valve closed
7/14/2011	12:36:12 PM	Bubbler valve closed
7/14/2011	12:36:12 PM	Helium MFC set to  0.000000
7/14/2011	12:36:12 PM	H2 MFC set to  0.000000
7/14/2011	12:36:12 PM	BCl3 MFC set to  0.000000
7/14/2011	12:36:12 PM	PHl3 MFC set to  0.000000
7/14/2011	12:36:12 PM	SiCl4 MFC set to  0.000000
7/14/2011	12:36:12 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	12:36:12 PM	Tube furnace set to 0
7/14/2011	12:36:13 PM	Run finished at 12:36 PM
7/14/2011	12:52:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/14/2011	12:52:23 PM	Recipe started at 12:52 PM
7/14/2011	12:52:23 PM	Helium valve closed
7/14/2011	12:52:23 PM	H2 valve closed
7/14/2011	12:52:23 PM	BCl3 valve closed
7/14/2011	12:52:23 PM	PH3 valve closed
7/14/2011	12:52:23 PM	SiCl4 pre valve closed
7/14/2011	12:52:23 PM	SiCl4 post valve closed
7/14/2011	12:52:23 PM	Main Vac valve closed
7/14/2011	12:52:23 PM	Bypass valve closed
7/14/2011	12:52:23 PM	Bubbler valve closed
7/14/2011	12:52:23 PM	Helium MFC set to  0.000000
7/14/2011	12:52:23 PM	H2 MFC set to  0.000000
7/14/2011	12:52:23 PM	BCl3 MFC set to  0.000000
7/14/2011	12:52:23 PM	PHl3 MFC set to  0.000000
7/14/2011	12:52:23 PM	SiCl4 MFC set to  0.000000
7/14/2011	12:52:23 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	12:52:23 PM	Tube furnace set to 0
7/14/2011	12:52:26 PM	H2 valve closed
7/14/2011	12:52:26 PM	BCl3 valve closed
7/14/2011	12:52:26 PM	PH3 valve closed
7/14/2011	12:52:26 PM	SiCl4 pre valve closed
7/14/2011	12:52:26 PM	SiCl4 post valve closed
7/14/2011	12:52:26 PM	Main Vac valve closed
7/14/2011	12:52:26 PM	Bypass valve closed
7/14/2011	12:52:26 PM	Bubbler valve closed
7/14/2011	12:52:26 PM	Helium valve opened
7/14/2011	12:52:26 PM	Helium MFC set to  500.000000
7/14/2011	12:52:26 PM	H2 MFC set to  0.000000
7/14/2011	12:52:26 PM	BCl3 MFC set to  0.000000
7/14/2011	12:52:26 PM	PHl3 MFC set to  0.000000
7/14/2011	12:52:26 PM	SiCl4 MFC set to  0.000000
7/14/2011	12:52:26 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	12:52:26 PM	Tube furnace set to 0
7/14/2011	12:52:35 PM	Helium valve closed
7/14/2011	12:52:35 PM	H2 valve closed
7/14/2011	12:52:35 PM	BCl3 valve closed
7/14/2011	12:52:35 PM	PH3 valve closed
7/14/2011	12:52:35 PM	SiCl4 pre valve closed
7/14/2011	12:52:35 PM	SiCl4 post valve closed
7/14/2011	12:52:35 PM	Main Vac valve closed
7/14/2011	12:52:35 PM	Bypass valve closed
7/14/2011	12:52:36 PM	Bubbler valve closed
7/14/2011	12:52:36 PM	Helium MFC set to  0.000000
7/14/2011	12:52:36 PM	H2 MFC set to  0.000000
7/14/2011	12:52:36 PM	BCl3 MFC set to  0.000000
7/14/2011	12:52:36 PM	PHl3 MFC set to  0.000000
7/14/2011	12:52:36 PM	SiCl4 MFC set to  0.000000
7/14/2011	12:52:36 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	12:52:36 PM	Tube furnace set to 0
7/14/2011	12:52:37 PM	Run finished at 12:52 PM
7/14/2011	12:52:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/14/2011	12:59:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2011	12:59:26 PM	Recipe started at 12:59 PM
7/14/2011	12:59:26 PM	Helium valve closed
7/14/2011	12:59:26 PM	H2 valve closed
7/14/2011	12:59:26 PM	BCl3 valve closed
7/14/2011	12:59:26 PM	PH3 valve closed
7/14/2011	12:59:26 PM	SiCl4 pre valve closed
7/14/2011	12:59:26 PM	SiCl4 post valve closed
7/14/2011	12:59:26 PM	Main Vac valve closed
7/14/2011	12:59:26 PM	Bubbler valve closed
7/14/2011	12:59:26 PM	Bypass valve opened
7/14/2011	12:59:26 PM	Helium MFC set to  0.000000
7/14/2011	12:59:26 PM	H2 MFC set to  0.000000
7/14/2011	12:59:26 PM	BCl3 MFC set to  0.000000
7/14/2011	12:59:26 PM	PHl3 MFC set to  0.000000
7/14/2011	12:59:26 PM	SiCl4 MFC set to  0.000000
7/14/2011	12:59:26 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	12:59:26 PM	Tube furnace set to 0
7/14/2011	12:59:50 PM	Run aborted at 12:59 PM
7/14/2011	12:59:50 PM	Helium valve closed
7/14/2011	12:59:50 PM	H2 valve closed
7/14/2011	12:59:50 PM	BCl3 valve closed
7/14/2011	12:59:50 PM	PH3 valve closed
7/14/2011	12:59:50 PM	SiCl4 pre valve closed
7/14/2011	12:59:50 PM	SiCl4 post valve closed
7/14/2011	12:59:50 PM	Bypass valve closed
7/14/2011	12:59:50 PM	Main Vac valve closed
7/14/2011	12:59:50 PM	Bubbler valve closed
7/14/2011	12:59:50 PM	Helium MFC set to  0.000000
7/14/2011	12:59:50 PM	H2 MFC set to  0.000000
7/14/2011	12:59:50 PM	BCl3 MFC set to  0.000000
7/14/2011	12:59:50 PM	PHl3 MFC set to  0.000000
7/14/2011	12:59:50 PM	SiCl4 MFC set to  0.000000
7/14/2011	12:59:50 PM	Tube furnace set to 0
7/14/2011	12:59:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2011	1:04:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2011	1:04:51 PM	Recipe started at 1:04 PM
7/14/2011	1:04:51 PM	Helium valve closed
7/14/2011	1:04:51 PM	H2 valve closed
7/14/2011	1:04:51 PM	BCl3 valve closed
7/14/2011	1:04:51 PM	PH3 valve closed
7/14/2011	1:04:51 PM	SiCl4 pre valve closed
7/14/2011	1:04:51 PM	SiCl4 post valve closed
7/14/2011	1:04:51 PM	Main Vac valve closed
7/14/2011	1:04:51 PM	Bubbler valve closed
7/14/2011	1:04:51 PM	Bypass valve opened
7/14/2011	1:04:51 PM	Helium MFC set to  0.000000
7/14/2011	1:04:51 PM	H2 MFC set to  0.000000
7/14/2011	1:04:51 PM	BCl3 MFC set to  0.000000
7/14/2011	1:04:51 PM	PHl3 MFC set to  0.000000
7/14/2011	1:04:51 PM	SiCl4 MFC set to  0.000000
7/14/2011	1:04:51 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	1:04:51 PM	Tube furnace set to 0
7/14/2011	1:05:50 PM	Helium valve closed
7/14/2011	1:05:50 PM	H2 valve closed
7/14/2011	1:05:50 PM	BCl3 valve closed
7/14/2011	1:05:50 PM	PH3 valve closed
7/14/2011	1:05:50 PM	SiCl4 pre valve closed
7/14/2011	1:05:50 PM	SiCl4 post valve closed
7/14/2011	1:05:50 PM	Main Vac valve closed
7/14/2011	1:05:50 PM	Bubbler valve closed
7/14/2011	1:05:50 PM	Bypass valve opened
7/14/2011	1:05:50 PM	Helium MFC set to  0.000000
7/14/2011	1:05:50 PM	H2 MFC set to  0.000000
7/14/2011	1:05:50 PM	BCl3 MFC set to  0.000000
7/14/2011	1:05:50 PM	PHl3 MFC set to  0.000000
7/14/2011	1:05:50 PM	SiCl4 MFC set to  0.000000
7/14/2011	1:05:50 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	1:05:50 PM	Tube furnace set to 0
7/14/2011	1:06:50 PM	Helium valve closed
7/14/2011	1:06:50 PM	H2 valve closed
7/14/2011	1:06:50 PM	BCl3 valve closed
7/14/2011	1:06:50 PM	PH3 valve closed
7/14/2011	1:06:50 PM	SiCl4 pre valve closed
7/14/2011	1:06:50 PM	SiCl4 post valve closed
7/14/2011	1:06:50 PM	Bypass valve closed
7/14/2011	1:06:50 PM	Bubbler valve closed
7/14/2011	1:06:50 PM	Main Vac valve opened
7/14/2011	1:06:50 PM	Helium MFC set to  0.000000
7/14/2011	1:06:50 PM	H2 MFC set to  0.000000
7/14/2011	1:06:50 PM	BCl3 MFC set to  0.000000
7/14/2011	1:06:50 PM	PHl3 MFC set to  0.000000
7/14/2011	1:06:50 PM	SiCl4 MFC set to  0.000000
7/14/2011	1:06:50 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	1:06:50 PM	Tube furnace set to 0
7/14/2011	1:06:51 PM	Run finished at 1:06 PM
7/14/2011	1:06:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2011	2:04:12 PM	Main Vac valve closed
7/14/2011	2:04:19 PM	Main Vac valve opened
7/14/2011	2:05:13 PM	Recipe started at 2:05 PM
7/14/2011	2:05:13 PM	Helium valve closed
7/14/2011	2:05:13 PM	H2 valve closed
7/14/2011	2:05:13 PM	BCl3 valve closed
7/14/2011	2:05:13 PM	PH3 valve closed
7/14/2011	2:05:13 PM	SiCl4 pre valve closed
7/14/2011	2:05:13 PM	SiCl4 post valve closed
7/14/2011	2:05:13 PM	Main Vac valve closed
7/14/2011	2:05:13 PM	Bypass valve closed
7/14/2011	2:05:13 PM	Bubbler valve closed
7/14/2011	2:05:13 PM	Helium MFC set to  0.000000
7/14/2011	2:05:13 PM	H2 MFC set to  0.000000
7/14/2011	2:05:13 PM	BCl3 MFC set to  0.000000
7/14/2011	2:05:13 PM	PHl3 MFC set to  0.000000
7/14/2011	2:05:13 PM	SiCl4 MFC set to  0.000000
7/14/2011	2:05:13 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	2:05:14 PM	Tube furnace set to 0
7/14/2011	2:05:17 PM	Helium valve closed
7/14/2011	2:05:17 PM	BCl3 valve closed
7/14/2011	2:05:17 PM	PH3 valve closed
7/14/2011	2:05:17 PM	SiCl4 pre valve closed
7/14/2011	2:05:17 PM	SiCl4 post valve closed
7/14/2011	2:05:17 PM	Main Vac valve closed
7/14/2011	2:05:17 PM	Bypass valve closed
7/14/2011	2:05:17 PM	Bubbler valve closed
7/14/2011	2:05:17 PM	H2 valve opened
7/14/2011	2:05:17 PM	Helium MFC set to  0.000000
7/14/2011	2:05:17 PM	H2 MFC set to  500.000000
7/14/2011	2:05:17 PM	BCl3 MFC set to  0.000000
7/14/2011	2:05:17 PM	PHl3 MFC set to  0.000000
7/14/2011	2:05:17 PM	SiCl4 MFC set to  0.000000
7/14/2011	2:05:17 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	2:05:17 PM	Tube furnace set to 0
7/14/2011	2:06:19 PM	Helium valve closed
7/14/2011	2:06:19 PM	BCl3 valve closed
7/14/2011	2:06:19 PM	PH3 valve closed
7/14/2011	2:06:19 PM	SiCl4 pre valve closed
7/14/2011	2:06:19 PM	SiCl4 post valve closed
7/14/2011	2:06:19 PM	Main Vac valve closed
7/14/2011	2:06:19 PM	Bypass valve closed
7/14/2011	2:06:19 PM	H2 valve opened
7/14/2011	2:06:19 PM	Bubbler valve opened
7/14/2011	2:06:19 PM	Helium MFC set to  0.000000
7/14/2011	2:06:19 PM	H2 MFC set to  500.000000
7/14/2011	2:06:19 PM	BCl3 MFC set to  0.000000
7/14/2011	2:06:19 PM	PHl3 MFC set to  0.000000
7/14/2011	2:06:19 PM	SiCl4 MFC set to  0.000000
7/14/2011	2:06:19 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	2:06:19 PM	Tube furnace set to 0
7/14/2011	2:06:20 PM	Helium valve closed
7/14/2011	2:06:20 PM	BCl3 valve closed
7/14/2011	2:06:20 PM	PH3 valve closed
7/14/2011	2:06:21 PM	SiCl4 pre valve closed
7/14/2011	2:06:21 PM	SiCl4 post valve closed
7/14/2011	2:06:21 PM	Main Vac valve closed
7/14/2011	2:06:21 PM	Bypass valve closed
7/14/2011	2:06:21 PM	H2 valve opened
7/14/2011	2:06:21 PM	Bubbler valve opened
7/14/2011	2:06:21 PM	Helium MFC set to  0.000000
7/14/2011	2:06:21 PM	H2 MFC set to  500.000000
7/14/2011	2:06:21 PM	BCl3 MFC set to  0.000000
7/14/2011	2:06:21 PM	PHl3 MFC set to  0.000000
7/14/2011	2:06:21 PM	SiCl4 MFC set to  0.000000
7/14/2011	2:06:21 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	2:06:21 PM	Tube furnace set to 1000
7/14/2011	2:26:21 PM	Helium valve closed
7/14/2011	2:26:21 PM	PH3 valve closed
7/14/2011	2:26:21 PM	Main Vac valve closed
7/14/2011	2:26:21 PM	Bypass valve closed
7/14/2011	2:26:21 PM	H2 valve opened
7/14/2011	2:26:21 PM	BCl3 valve opened
7/14/2011	2:26:21 PM	SiCl4 pre valve opened
7/14/2011	2:26:21 PM	SiCl4 post valve opened
7/14/2011	2:26:21 PM	Bubbler valve opened
7/14/2011	2:26:21 PM	Helium MFC set to  0.000000
7/14/2011	2:26:21 PM	H2 MFC set to  500.000000
7/14/2011	2:26:21 PM	BCl3 MFC set to  1.000000
7/14/2011	2:26:21 PM	PHl3 MFC set to  0.000000
7/14/2011	2:26:21 PM	SiCl4 MFC set to  50.000000
7/14/2011	2:26:21 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	2:26:21 PM	Tube furnace set to 1000
7/14/2011	2:26:21 PM	Helium valve closed
7/14/2011	2:26:21 PM	H2 valve closed
7/14/2011	2:26:21 PM	BCl3 valve closed
7/14/2011	2:26:21 PM	PH3 valve closed
7/14/2011	2:26:21 PM	SiCl4 pre valve closed
7/14/2011	2:26:21 PM	SiCl4 post valve closed
7/14/2011	2:26:21 PM	Main Vac valve closed
7/14/2011	2:26:21 PM	Bubbler valve closed
7/14/2011	2:26:21 PM	Bypass valve closed
7/14/2011	2:26:21 PM	Helium MFC set to  0.000000
7/14/2011	2:26:21 PM	H2 MFC set to  0.000000
7/14/2011	2:26:21 PM	BCl3 MFC set to  0.000000
7/14/2011	2:26:21 PM	PHl3 MFC set to  0.000000
7/14/2011	2:26:21 PM	SiCl4 MFC set to  0.000000
7/14/2011	2:26:21 PM	Bypass solenoid MFC set to  760.000000
7/14/2011	2:26:21 PM	Tube furnace set to 0
7/14/2011	2:26:21 PM	Baratron reads 1062.879148 Torr.  Emergency exit.
7/14/2011	3:02:31 PM	Run aborted at 3:02 PM
7/14/2011	3:02:31 PM	Helium valve closed
7/14/2011	3:02:31 PM	H2 valve closed
7/14/2011	3:02:31 PM	BCl3 valve closed
7/14/2011	3:02:31 PM	PH3 valve closed
7/14/2011	3:02:31 PM	SiCl4 pre valve closed
7/14/2011	3:02:31 PM	SiCl4 post valve closed
7/14/2011	3:02:31 PM	Main Vac valve closed
7/14/2011	3:02:31 PM	Bubbler valve closed
7/14/2011	3:02:31 PM	Bypass valve closed
7/14/2011	3:02:31 PM	Helium MFC set to  0.000000
7/14/2011	3:02:31 PM	H2 MFC set to  0.000000
7/14/2011	3:02:31 PM	BCl3 MFC set to  0.000000
7/14/2011	3:02:31 PM	PHl3 MFC set to  0.000000
7/14/2011	3:02:31 PM	SiCl4 MFC set to  0.000000
7/14/2011	3:02:31 PM	Bypass solenoid MFC set to  760.000000
7/14/2011	3:02:31 PM	Tube furnace set to 0
7/14/2011	3:02:31 PM	Baratron reads 1008.775263 Torr.  Emergency exit.
7/14/2011	3:02:33 PM	Program exited cleanly
7/14/2011	3:02:35 PM	Program started normally
7/14/2011	3:02:35 PM	Helium valve closed
7/14/2011	3:02:35 PM	H2 valve closed
7/14/2011	3:02:35 PM	BCl3 valve closed
7/14/2011	3:02:35 PM	PH3 valve closed
7/14/2011	3:02:35 PM	SiCl4 pre valve closed
7/14/2011	3:02:35 PM	SiCl4 post valve closed
7/14/2011	3:02:35 PM	Main Vac valve closed
7/14/2011	3:02:35 PM	Bypass valve closed
7/14/2011	3:02:35 PM	Bubbler valve closed
7/14/2011	3:02:35 PM	Helium MFC set to  0.000000
7/14/2011	3:02:35 PM	H2 MFC set to  0.000000
7/14/2011	3:02:35 PM	BCl3 MFC set to  0.000000
7/14/2011	3:02:35 PM	PHl3 MFC set to  0.000000
7/14/2011	3:02:35 PM	SiCl4 MFC set to  0.000000
7/14/2011	3:02:35 PM	Bypass solenoid MFC set to  760.000000
7/14/2011	3:02:35 PM	Tube furnace set to 0
7/14/2011	3:02:35 PM	Helium valve closed
7/14/2011	3:02:35 PM	H2 valve closed
7/14/2011	3:02:35 PM	BCl3 valve closed
7/14/2011	3:02:35 PM	PH3 valve closed
7/14/2011	3:02:35 PM	SiCl4 pre valve closed
7/14/2011	3:02:35 PM	SiCl4 post valve closed
7/14/2011	3:02:35 PM	Main Vac valve closed
7/14/2011	3:02:35 PM	Bubbler valve closed
7/14/2011	3:02:35 PM	Bypass valve closed
7/14/2011	3:02:35 PM	Helium MFC set to  0.000000
7/14/2011	3:02:35 PM	H2 MFC set to  0.000000
7/14/2011	3:02:35 PM	BCl3 MFC set to  0.000000
7/14/2011	3:02:35 PM	PHl3 MFC set to  0.000000
7/14/2011	3:02:35 PM	SiCl4 MFC set to  0.000000
7/14/2011	3:02:35 PM	Bypass solenoid MFC set to  760.000000
7/14/2011	3:02:35 PM	Tube furnace set to 0
7/14/2011	3:02:35 PM	Baratron reads 1007.754435 Torr.  Emergency exit.
7/14/2011	3:02:37 PM	Program exited cleanly
7/14/2011	3:02:51 PM	Program started normally
7/14/2011	3:02:51 PM	Helium valve closed
7/14/2011	3:02:51 PM	H2 valve closed
7/14/2011	3:02:51 PM	BCl3 valve closed
7/14/2011	3:02:51 PM	PH3 valve closed
7/14/2011	3:02:51 PM	SiCl4 pre valve closed
7/14/2011	3:02:51 PM	SiCl4 post valve closed
7/14/2011	3:02:51 PM	Main Vac valve closed
7/14/2011	3:02:51 PM	Bypass valve closed
7/14/2011	3:02:51 PM	Bubbler valve closed
7/14/2011	3:02:51 PM	Helium MFC set to  0.000000
7/14/2011	3:02:51 PM	H2 MFC set to  0.000000
7/14/2011	3:02:51 PM	BCl3 MFC set to  0.000000
7/14/2011	3:02:51 PM	PHl3 MFC set to  0.000000
7/14/2011	3:02:51 PM	SiCl4 MFC set to  0.000000
7/14/2011	3:02:51 PM	Bypass solenoid MFC set to  760.000000
7/14/2011	3:02:51 PM	Tube furnace set to 0
7/14/2011	3:02:52 PM	Bypass valve opened
7/14/2011	3:04:00 PM	Bypass valve closed
7/14/2011	3:04:01 PM	Main Vac valve opened
7/14/2011	3:12:38 PM	Main Vac valve closed
7/14/2011	3:12:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/14/2011	3:12:40 PM	Recipe started at 3:12 PM
7/14/2011	3:12:40 PM	Helium valve closed
7/14/2011	3:12:40 PM	H2 valve closed
7/14/2011	3:12:40 PM	BCl3 valve closed
7/14/2011	3:12:40 PM	PH3 valve closed
7/14/2011	3:12:40 PM	SiCl4 pre valve closed
7/14/2011	3:12:40 PM	SiCl4 post valve closed
7/14/2011	3:12:40 PM	Main Vac valve closed
7/14/2011	3:12:40 PM	Bypass valve closed
7/14/2011	3:12:40 PM	Bubbler valve closed
7/14/2011	3:12:40 PM	Helium MFC set to  0.000000
7/14/2011	3:12:40 PM	H2 MFC set to  0.000000
7/14/2011	3:12:40 PM	BCl3 MFC set to  0.000000
7/14/2011	3:12:40 PM	PHl3 MFC set to  0.000000
7/14/2011	3:12:40 PM	SiCl4 MFC set to  0.000000
7/14/2011	3:12:40 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	3:12:40 PM	Tube furnace set to 0
7/14/2011	3:12:43 PM	H2 valve closed
7/14/2011	3:12:43 PM	BCl3 valve closed
7/14/2011	3:12:43 PM	PH3 valve closed
7/14/2011	3:12:43 PM	SiCl4 pre valve closed
7/14/2011	3:12:43 PM	SiCl4 post valve closed
7/14/2011	3:12:43 PM	Main Vac valve closed
7/14/2011	3:12:43 PM	Bypass valve closed
7/14/2011	3:12:43 PM	Bubbler valve closed
7/14/2011	3:12:43 PM	Helium valve opened
7/14/2011	3:12:43 PM	Helium MFC set to  500.000000
7/14/2011	3:12:43 PM	H2 MFC set to  0.000000
7/14/2011	3:12:43 PM	BCl3 MFC set to  0.000000
7/14/2011	3:12:43 PM	PHl3 MFC set to  0.000000
7/14/2011	3:12:43 PM	SiCl4 MFC set to  0.000000
7/14/2011	3:12:43 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	3:12:44 PM	Tube furnace set to 0
7/14/2011	3:13:39 PM	Helium valve closed
7/14/2011	3:13:39 PM	H2 valve closed
7/14/2011	3:13:39 PM	BCl3 valve closed
7/14/2011	3:13:39 PM	PH3 valve closed
7/14/2011	3:13:39 PM	SiCl4 pre valve closed
7/14/2011	3:13:39 PM	SiCl4 post valve closed
7/14/2011	3:13:39 PM	Main Vac valve closed
7/14/2011	3:13:39 PM	Bypass valve closed
7/14/2011	3:13:39 PM	Bubbler valve closed
7/14/2011	3:13:39 PM	Helium MFC set to  0.000000
7/14/2011	3:13:39 PM	H2 MFC set to  0.000000
7/14/2011	3:13:39 PM	BCl3 MFC set to  0.000000
7/14/2011	3:13:39 PM	PHl3 MFC set to  0.000000
7/14/2011	3:13:39 PM	SiCl4 MFC set to  0.000000
7/14/2011	3:13:39 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	3:13:39 PM	Tube furnace set to 0
7/14/2011	3:13:40 PM	Run finished at 3:13 PM
7/14/2011	3:13:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/14/2011	3:13:54 PM	Helium MFC set to  500.000000
7/14/2011	3:13:56 PM	Helium valve opened
7/14/2011	3:14:02 PM	Bubbler valve opened
7/14/2011	3:15:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/14/2011	3:16:00 PM	Recipe started at 3:16 PM
7/14/2011	3:16:00 PM	Helium valve closed
7/14/2011	3:16:00 PM	H2 valve closed
7/14/2011	3:16:00 PM	BCl3 valve closed
7/14/2011	3:16:00 PM	PH3 valve closed
7/14/2011	3:16:00 PM	SiCl4 pre valve closed
7/14/2011	3:16:00 PM	SiCl4 post valve closed
7/14/2011	3:16:00 PM	Main Vac valve closed
7/14/2011	3:16:00 PM	Bypass valve closed
7/14/2011	3:16:00 PM	Bubbler valve closed
7/14/2011	3:16:00 PM	Helium MFC set to  0.000000
7/14/2011	3:16:00 PM	H2 MFC set to  0.000000
7/14/2011	3:16:00 PM	BCl3 MFC set to  0.000000
7/14/2011	3:16:00 PM	PHl3 MFC set to  0.000000
7/14/2011	3:16:00 PM	SiCl4 MFC set to  0.000000
7/14/2011	3:16:00 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	3:16:00 PM	Tube furnace set to 0
7/14/2011	3:16:00 PM	Run finished at 3:16 PM
7/14/2011	3:16:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/14/2011	3:16:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2011	3:16:03 PM	Recipe started at 3:16 PM
7/14/2011	3:16:03 PM	Helium valve closed
7/14/2011	3:16:03 PM	H2 valve closed
7/14/2011	3:16:03 PM	BCl3 valve closed
7/14/2011	3:16:03 PM	PH3 valve closed
7/14/2011	3:16:03 PM	SiCl4 pre valve closed
7/14/2011	3:16:03 PM	SiCl4 post valve closed
7/14/2011	3:16:03 PM	Main Vac valve closed
7/14/2011	3:16:03 PM	Bubbler valve closed
7/14/2011	3:16:03 PM	Bypass valve opened
7/14/2011	3:16:03 PM	Helium MFC set to  0.000000
7/14/2011	3:16:03 PM	H2 MFC set to  0.000000
7/14/2011	3:16:03 PM	BCl3 MFC set to  0.000000
7/14/2011	3:16:03 PM	PHl3 MFC set to  0.000000
7/14/2011	3:16:03 PM	SiCl4 MFC set to  0.000000
7/14/2011	3:16:03 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	3:16:03 PM	Tube furnace set to 0
7/14/2011	3:16:50 PM	Helium valve closed
7/14/2011	3:16:50 PM	H2 valve closed
7/14/2011	3:16:50 PM	BCl3 valve closed
7/14/2011	3:16:50 PM	PH3 valve closed
7/14/2011	3:16:50 PM	SiCl4 pre valve closed
7/14/2011	3:16:50 PM	SiCl4 post valve closed
7/14/2011	3:16:50 PM	Main Vac valve closed
7/14/2011	3:16:50 PM	Bubbler valve closed
7/14/2011	3:16:50 PM	Bypass valve opened
7/14/2011	3:16:50 PM	Helium MFC set to  0.000000
7/14/2011	3:16:50 PM	H2 MFC set to  0.000000
7/14/2011	3:16:50 PM	BCl3 MFC set to  0.000000
7/14/2011	3:16:50 PM	PHl3 MFC set to  0.000000
7/14/2011	3:16:50 PM	SiCl4 MFC set to  0.000000
7/14/2011	3:16:50 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	3:16:50 PM	Tube furnace set to 0
7/14/2011	3:16:57 PM	Helium valve closed
7/14/2011	3:16:57 PM	H2 valve closed
7/14/2011	3:16:57 PM	BCl3 valve closed
7/14/2011	3:16:57 PM	PH3 valve closed
7/14/2011	3:16:57 PM	SiCl4 pre valve closed
7/14/2011	3:16:57 PM	SiCl4 post valve closed
7/14/2011	3:16:57 PM	Bypass valve closed
7/14/2011	3:16:57 PM	Bubbler valve closed
7/14/2011	3:16:57 PM	Main Vac valve opened
7/14/2011	3:16:57 PM	Helium MFC set to  0.000000
7/14/2011	3:16:57 PM	H2 MFC set to  0.000000
7/14/2011	3:16:57 PM	BCl3 MFC set to  0.000000
7/14/2011	3:16:57 PM	PHl3 MFC set to  0.000000
7/14/2011	3:16:57 PM	SiCl4 MFC set to  0.000000
7/14/2011	3:16:57 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	3:16:57 PM	Tube furnace set to 0
7/14/2011	3:16:58 PM	Run finished at 3:16 PM
7/14/2011	3:16:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2011	3:17:16 PM	Main Vac valve closed
7/14/2011	3:17:17 PM	Main Vac valve opened
7/14/2011	3:22:23 PM	Helium MFC set to  20.000000
7/14/2011	3:24:52 PM	Helium valve opened
7/14/2011	3:25:02 PM	Helium valve closed
7/14/2011	3:26:25 PM	Main Vac valve closed
7/14/2011	3:26:48 PM	Main Vac valve opened
7/14/2011	3:42:56 PM	Main Vac valve closed
7/14/2011	3:43:23 PM	Main Vac valve opened
7/14/2011	3:43:52 PM	Recipe started at 3:43 PM
7/14/2011	3:43:52 PM	Helium valve closed
7/14/2011	3:43:52 PM	H2 valve closed
7/14/2011	3:43:52 PM	BCl3 valve closed
7/14/2011	3:43:52 PM	PH3 valve closed
7/14/2011	3:43:52 PM	SiCl4 pre valve closed
7/14/2011	3:43:52 PM	SiCl4 post valve closed
7/14/2011	3:43:52 PM	Main Vac valve closed
7/14/2011	3:43:52 PM	Bypass valve closed
7/14/2011	3:43:52 PM	Bubbler valve closed
7/14/2011	3:43:52 PM	Helium MFC set to  0.000000
7/14/2011	3:43:52 PM	H2 MFC set to  0.000000
7/14/2011	3:43:52 PM	BCl3 MFC set to  0.000000
7/14/2011	3:43:52 PM	PHl3 MFC set to  0.000000
7/14/2011	3:43:52 PM	SiCl4 MFC set to  0.000000
7/14/2011	3:43:52 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	3:43:52 PM	Tube furnace set to 0
7/14/2011	3:43:55 PM	Helium valve closed
7/14/2011	3:43:55 PM	BCl3 valve closed
7/14/2011	3:43:55 PM	PH3 valve closed
7/14/2011	3:43:55 PM	SiCl4 pre valve closed
7/14/2011	3:43:55 PM	SiCl4 post valve closed
7/14/2011	3:43:55 PM	Main Vac valve closed
7/14/2011	3:43:55 PM	Bypass valve closed
7/14/2011	3:43:55 PM	Bubbler valve closed
7/14/2011	3:43:55 PM	H2 valve opened
7/14/2011	3:43:55 PM	Helium MFC set to  0.000000
7/14/2011	3:43:55 PM	H2 MFC set to  500.000000
7/14/2011	3:43:55 PM	BCl3 MFC set to  0.000000
7/14/2011	3:43:55 PM	PHl3 MFC set to  0.000000
7/14/2011	3:43:55 PM	SiCl4 MFC set to  0.000000
7/14/2011	3:43:55 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	3:43:55 PM	Tube furnace set to 0
7/14/2011	3:44:55 PM	Helium valve closed
7/14/2011	3:44:55 PM	BCl3 valve closed
7/14/2011	3:44:55 PM	PH3 valve closed
7/14/2011	3:44:55 PM	SiCl4 pre valve closed
7/14/2011	3:44:55 PM	SiCl4 post valve closed
7/14/2011	3:44:55 PM	Main Vac valve closed
7/14/2011	3:44:55 PM	Bypass valve closed
7/14/2011	3:44:55 PM	H2 valve opened
7/14/2011	3:44:55 PM	Bubbler valve opened
7/14/2011	3:44:55 PM	Helium MFC set to  0.000000
7/14/2011	3:44:55 PM	H2 MFC set to  500.000000
7/14/2011	3:44:55 PM	BCl3 MFC set to  0.000000
7/14/2011	3:44:55 PM	PHl3 MFC set to  0.000000
7/14/2011	3:44:55 PM	SiCl4 MFC set to  0.000000
7/14/2011	3:44:55 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	3:44:55 PM	Tube furnace set to 0
7/14/2011	3:44:56 PM	Helium valve closed
7/14/2011	3:44:56 PM	BCl3 valve closed
7/14/2011	3:44:56 PM	PH3 valve closed
7/14/2011	3:44:56 PM	SiCl4 pre valve closed
7/14/2011	3:44:56 PM	SiCl4 post valve closed
7/14/2011	3:44:56 PM	Main Vac valve closed
7/14/2011	3:44:56 PM	Bypass valve closed
7/14/2011	3:44:56 PM	H2 valve opened
7/14/2011	3:44:56 PM	Bubbler valve opened
7/14/2011	3:44:56 PM	Helium MFC set to  0.000000
7/14/2011	3:44:56 PM	H2 MFC set to  500.000000
7/14/2011	3:44:56 PM	BCl3 MFC set to  0.000000
7/14/2011	3:44:56 PM	PHl3 MFC set to  0.000000
7/14/2011	3:44:56 PM	SiCl4 MFC set to  0.000000
7/14/2011	3:44:56 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	3:44:57 PM	Tube furnace set to 1000
7/14/2011	4:00:21 PM	Helium valve closed
7/14/2011	4:00:21 PM	PH3 valve closed
7/14/2011	4:00:21 PM	Main Vac valve closed
7/14/2011	4:00:21 PM	Bypass valve closed
7/14/2011	4:00:21 PM	H2 valve opened
7/14/2011	4:00:21 PM	BCl3 valve opened
7/14/2011	4:00:21 PM	SiCl4 pre valve opened
7/14/2011	4:00:21 PM	SiCl4 post valve opened
7/14/2011	4:00:21 PM	Bubbler valve opened
7/14/2011	4:00:21 PM	Helium MFC set to  0.000000
7/14/2011	4:00:21 PM	H2 MFC set to  500.000000
7/14/2011	4:00:21 PM	BCl3 MFC set to  1.000000
7/14/2011	4:00:21 PM	PHl3 MFC set to  0.000000
7/14/2011	4:00:21 PM	SiCl4 MFC set to  50.000000
7/14/2011	4:00:21 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	4:00:21 PM	Tube furnace set to 1000
7/14/2011	4:20:21 PM	Helium valve closed
7/14/2011	4:20:21 PM	BCl3 valve closed
7/14/2011	4:20:21 PM	PH3 valve closed
7/14/2011	4:20:21 PM	SiCl4 pre valve closed
7/14/2011	4:20:21 PM	SiCl4 post valve closed
7/14/2011	4:20:21 PM	Main Vac valve closed
7/14/2011	4:20:21 PM	Bypass valve closed
7/14/2011	4:20:21 PM	H2 valve opened
7/14/2011	4:20:21 PM	Bubbler valve opened
7/14/2011	4:20:21 PM	Helium MFC set to  0.000000
7/14/2011	4:20:21 PM	H2 MFC set to  500.000000
7/14/2011	4:20:21 PM	BCl3 MFC set to  0.000000
7/14/2011	4:20:21 PM	PHl3 MFC set to  0.000000
7/14/2011	4:20:21 PM	SiCl4 MFC set to  0.000000
7/14/2011	4:20:21 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	4:20:21 PM	Tube furnace set to 950
7/14/2011	4:23:21 PM	H2 valve closed
7/14/2011	4:23:21 PM	BCl3 valve closed
7/14/2011	4:23:21 PM	PH3 valve closed
7/14/2011	4:23:21 PM	SiCl4 pre valve closed
7/14/2011	4:23:21 PM	SiCl4 post valve closed
7/14/2011	4:23:21 PM	Main Vac valve closed
7/14/2011	4:23:21 PM	Bypass valve closed
7/14/2011	4:23:21 PM	Helium valve opened
7/14/2011	4:23:21 PM	Bubbler valve opened
7/14/2011	4:23:21 PM	Helium MFC set to  500.000000
7/14/2011	4:23:21 PM	H2 MFC set to  0.000000
7/14/2011	4:23:21 PM	BCl3 MFC set to  0.000000
7/14/2011	4:23:21 PM	PHl3 MFC set to  0.000000
7/14/2011	4:23:21 PM	SiCl4 MFC set to  0.000000
7/14/2011	4:23:21 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	4:23:21 PM	Tube furnace set to 900
7/14/2011	4:26:21 PM	H2 valve closed
7/14/2011	4:26:21 PM	BCl3 valve closed
7/14/2011	4:26:21 PM	PH3 valve closed
7/14/2011	4:26:21 PM	SiCl4 pre valve closed
7/14/2011	4:26:21 PM	SiCl4 post valve closed
7/14/2011	4:26:21 PM	Main Vac valve closed
7/14/2011	4:26:21 PM	Bypass valve closed
7/14/2011	4:26:21 PM	Helium valve opened
7/14/2011	4:26:21 PM	Bubbler valve opened
7/14/2011	4:26:21 PM	Helium MFC set to  500.000000
7/14/2011	4:26:21 PM	H2 MFC set to  0.000000
7/14/2011	4:26:21 PM	BCl3 MFC set to  0.000000
7/14/2011	4:26:21 PM	PHl3 MFC set to  0.000000
7/14/2011	4:26:21 PM	SiCl4 MFC set to  0.000000
7/14/2011	4:26:21 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	4:26:21 PM	Tube furnace set to 850
7/14/2011	4:29:21 PM	H2 valve closed
7/14/2011	4:29:21 PM	BCl3 valve closed
7/14/2011	4:29:21 PM	PH3 valve closed
7/14/2011	4:29:21 PM	SiCl4 pre valve closed
7/14/2011	4:29:21 PM	SiCl4 post valve closed
7/14/2011	4:29:21 PM	Main Vac valve closed
7/14/2011	4:29:21 PM	Bypass valve closed
7/14/2011	4:29:21 PM	Helium valve opened
7/14/2011	4:29:21 PM	Bubbler valve opened
7/14/2011	4:29:21 PM	Helium MFC set to  500.000000
7/14/2011	4:29:21 PM	H2 MFC set to  0.000000
7/14/2011	4:29:21 PM	BCl3 MFC set to  0.000000
7/14/2011	4:29:21 PM	PHl3 MFC set to  0.000000
7/14/2011	4:29:21 PM	SiCl4 MFC set to  0.000000
7/14/2011	4:29:21 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	4:29:22 PM	Tube furnace set to 800
7/14/2011	4:32:22 PM	H2 valve closed
7/14/2011	4:32:22 PM	BCl3 valve closed
7/14/2011	4:32:22 PM	PH3 valve closed
7/14/2011	4:32:22 PM	SiCl4 pre valve closed
7/14/2011	4:32:22 PM	SiCl4 post valve closed
7/14/2011	4:32:22 PM	Main Vac valve closed
7/14/2011	4:32:22 PM	Bypass valve closed
7/14/2011	4:32:22 PM	Helium valve opened
7/14/2011	4:32:22 PM	Bubbler valve opened
7/14/2011	4:32:22 PM	Helium MFC set to  500.000000
7/14/2011	4:32:22 PM	H2 MFC set to  0.000000
7/14/2011	4:32:22 PM	BCl3 MFC set to  0.000000
7/14/2011	4:32:22 PM	PHl3 MFC set to  0.000000
7/14/2011	4:32:22 PM	SiCl4 MFC set to  0.000000
7/14/2011	4:32:22 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	4:32:22 PM	Tube furnace set to 750
7/14/2011	4:35:22 PM	H2 valve closed
7/14/2011	4:35:22 PM	BCl3 valve closed
7/14/2011	4:35:22 PM	PH3 valve closed
7/14/2011	4:35:22 PM	SiCl4 pre valve closed
7/14/2011	4:35:22 PM	SiCl4 post valve closed
7/14/2011	4:35:22 PM	Main Vac valve closed
7/14/2011	4:35:22 PM	Bypass valve closed
7/14/2011	4:35:22 PM	Helium valve opened
7/14/2011	4:35:22 PM	Bubbler valve opened
7/14/2011	4:35:22 PM	Helium MFC set to  500.000000
7/14/2011	4:35:22 PM	H2 MFC set to  0.000000
7/14/2011	4:35:22 PM	BCl3 MFC set to  0.000000
7/14/2011	4:35:22 PM	PHl3 MFC set to  0.000000
7/14/2011	4:35:22 PM	SiCl4 MFC set to  0.000000
7/14/2011	4:35:22 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	4:35:22 PM	Tube furnace set to 0
7/14/2011	4:55:22 PM	Helium valve closed
7/14/2011	4:55:22 PM	H2 valve closed
7/14/2011	4:55:22 PM	BCl3 valve closed
7/14/2011	4:55:22 PM	PH3 valve closed
7/14/2011	4:55:22 PM	SiCl4 pre valve closed
7/14/2011	4:55:22 PM	SiCl4 post valve closed
7/14/2011	4:55:22 PM	Main Vac valve closed
7/14/2011	4:55:22 PM	Bypass valve closed
7/14/2011	4:55:22 PM	Bubbler valve closed
7/14/2011	4:55:22 PM	Helium MFC set to  0.000000
7/14/2011	4:55:22 PM	H2 MFC set to  0.000000
7/14/2011	4:55:22 PM	BCl3 MFC set to  0.000000
7/14/2011	4:55:22 PM	PHl3 MFC set to  0.000000
7/14/2011	4:55:22 PM	SiCl4 MFC set to  0.000000
7/14/2011	4:55:22 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	4:55:22 PM	Tube furnace set to 0
7/14/2011	4:55:23 PM	Run finished at 4:55 PM
7/14/2011	5:02:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2011	5:02:16 PM	Recipe started at 5:02 PM
7/14/2011	5:02:16 PM	Helium valve closed
7/14/2011	5:02:16 PM	H2 valve closed
7/14/2011	5:02:16 PM	BCl3 valve closed
7/14/2011	5:02:16 PM	PH3 valve closed
7/14/2011	5:02:16 PM	SiCl4 pre valve closed
7/14/2011	5:02:16 PM	SiCl4 post valve closed
7/14/2011	5:02:16 PM	Main Vac valve closed
7/14/2011	5:02:16 PM	Bubbler valve closed
7/14/2011	5:02:16 PM	Bypass valve opened
7/14/2011	5:02:16 PM	Helium MFC set to  0.000000
7/14/2011	5:02:16 PM	H2 MFC set to  0.000000
7/14/2011	5:02:16 PM	BCl3 MFC set to  0.000000
7/14/2011	5:02:16 PM	PHl3 MFC set to  0.000000
7/14/2011	5:02:16 PM	SiCl4 MFC set to  0.000000
7/14/2011	5:02:16 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	5:02:16 PM	Tube furnace set to 0
7/14/2011	5:03:19 PM	Helium valve closed
7/14/2011	5:03:19 PM	H2 valve closed
7/14/2011	5:03:19 PM	BCl3 valve closed
7/14/2011	5:03:19 PM	PH3 valve closed
7/14/2011	5:03:19 PM	SiCl4 pre valve closed
7/14/2011	5:03:19 PM	SiCl4 post valve closed
7/14/2011	5:03:19 PM	Main Vac valve closed
7/14/2011	5:03:19 PM	Bubbler valve closed
7/14/2011	5:03:19 PM	Bypass valve opened
7/14/2011	5:03:19 PM	Helium MFC set to  0.000000
7/14/2011	5:03:19 PM	H2 MFC set to  0.000000
7/14/2011	5:03:19 PM	BCl3 MFC set to  0.000000
7/14/2011	5:03:19 PM	PHl3 MFC set to  0.000000
7/14/2011	5:03:19 PM	SiCl4 MFC set to  0.000000
7/14/2011	5:03:19 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	5:03:19 PM	Tube furnace set to 0
7/14/2011	5:04:19 PM	Helium valve closed
7/14/2011	5:04:19 PM	H2 valve closed
7/14/2011	5:04:19 PM	BCl3 valve closed
7/14/2011	5:04:19 PM	PH3 valve closed
7/14/2011	5:04:19 PM	SiCl4 pre valve closed
7/14/2011	5:04:19 PM	SiCl4 post valve closed
7/14/2011	5:04:19 PM	Bypass valve closed
7/14/2011	5:04:19 PM	Bubbler valve closed
7/14/2011	5:04:19 PM	Main Vac valve opened
7/14/2011	5:04:19 PM	Helium MFC set to  0.000000
7/14/2011	5:04:19 PM	H2 MFC set to  0.000000
7/14/2011	5:04:19 PM	BCl3 MFC set to  0.000000
7/14/2011	5:04:19 PM	PHl3 MFC set to  0.000000
7/14/2011	5:04:19 PM	SiCl4 MFC set to  0.000000
7/14/2011	5:04:19 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	5:04:19 PM	Tube furnace set to 0
7/14/2011	5:04:20 PM	Run finished at 5:04 PM
7/14/2011	5:04:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2011	5:05:26 PM	Helium MFC set to  20.000000
7/14/2011	5:05:27 PM	Helium valve opened
7/14/2011	5:05:57 PM	Helium valve closed
7/14/2011	5:06:17 PM	Helium valve opened
7/14/2011	5:10:19 PM	Helium valve closed
7/14/2011	5:13:46 PM	Helium valve opened
7/14/2011	5:14:23 PM	Helium valve closed
7/14/2011	5:14:55 PM	Helium valve opened
7/14/2011	5:15:14 PM	Helium valve closed
7/14/2011	5:16:43 PM	Helium valve opened
7/14/2011	5:18:51 PM	Helium valve closed
7/14/2011	5:32:50 PM	Main Vac valve closed
7/14/2011	5:33:11 PM	Main Vac valve opened
7/14/2011	5:33:23 PM	Recipe started at 5:33 PM
7/14/2011	5:33:23 PM	Helium valve closed
7/14/2011	5:33:23 PM	H2 valve closed
7/14/2011	5:33:23 PM	BCl3 valve closed
7/14/2011	5:33:23 PM	PH3 valve closed
7/14/2011	5:33:23 PM	SiCl4 pre valve closed
7/14/2011	5:33:23 PM	SiCl4 post valve closed
7/14/2011	5:33:23 PM	Main Vac valve closed
7/14/2011	5:33:23 PM	Bypass valve closed
7/14/2011	5:33:23 PM	Bubbler valve closed
7/14/2011	5:33:23 PM	Helium MFC set to  0.000000
7/14/2011	5:33:23 PM	H2 MFC set to  0.000000
7/14/2011	5:33:23 PM	BCl3 MFC set to  0.000000
7/14/2011	5:33:23 PM	PHl3 MFC set to  0.000000
7/14/2011	5:33:23 PM	SiCl4 MFC set to  0.000000
7/14/2011	5:33:23 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	5:33:23 PM	Tube furnace set to 0
7/14/2011	5:33:26 PM	Helium valve closed
7/14/2011	5:33:26 PM	BCl3 valve closed
7/14/2011	5:33:26 PM	PH3 valve closed
7/14/2011	5:33:26 PM	SiCl4 pre valve closed
7/14/2011	5:33:26 PM	SiCl4 post valve closed
7/14/2011	5:33:26 PM	Main Vac valve closed
7/14/2011	5:33:26 PM	Bypass valve closed
7/14/2011	5:33:26 PM	Bubbler valve closed
7/14/2011	5:33:26 PM	H2 valve opened
7/14/2011	5:33:26 PM	Helium MFC set to  0.000000
7/14/2011	5:33:26 PM	H2 MFC set to  500.000000
7/14/2011	5:33:26 PM	BCl3 MFC set to  0.000000
7/14/2011	5:33:26 PM	PHl3 MFC set to  0.000000
7/14/2011	5:33:26 PM	SiCl4 MFC set to  0.000000
7/14/2011	5:33:26 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	5:33:26 PM	Tube furnace set to 0
7/14/2011	5:34:28 PM	Helium valve closed
7/14/2011	5:34:28 PM	BCl3 valve closed
7/14/2011	5:34:28 PM	PH3 valve closed
7/14/2011	5:34:28 PM	SiCl4 pre valve closed
7/14/2011	5:34:28 PM	SiCl4 post valve closed
7/14/2011	5:34:28 PM	Main Vac valve closed
7/14/2011	5:34:28 PM	Bypass valve closed
7/14/2011	5:34:28 PM	H2 valve opened
7/14/2011	5:34:28 PM	Bubbler valve opened
7/14/2011	5:34:28 PM	Helium MFC set to  0.000000
7/14/2011	5:34:28 PM	H2 MFC set to  500.000000
7/14/2011	5:34:28 PM	BCl3 MFC set to  0.000000
7/14/2011	5:34:29 PM	PHl3 MFC set to  0.000000
7/14/2011	5:34:29 PM	SiCl4 MFC set to  0.000000
7/14/2011	5:34:29 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	5:34:29 PM	Tube furnace set to 0
7/14/2011	5:34:30 PM	Helium valve closed
7/14/2011	5:34:30 PM	BCl3 valve closed
7/14/2011	5:34:30 PM	PH3 valve closed
7/14/2011	5:34:30 PM	SiCl4 pre valve closed
7/14/2011	5:34:30 PM	SiCl4 post valve closed
7/14/2011	5:34:30 PM	Main Vac valve closed
7/14/2011	5:34:30 PM	Bypass valve closed
7/14/2011	5:34:30 PM	H2 valve opened
7/14/2011	5:34:30 PM	Bubbler valve opened
7/14/2011	5:34:30 PM	Helium MFC set to  0.000000
7/14/2011	5:34:30 PM	H2 MFC set to  500.000000
7/14/2011	5:34:30 PM	BCl3 MFC set to  0.000000
7/14/2011	5:34:30 PM	PHl3 MFC set to  0.000000
7/14/2011	5:34:30 PM	SiCl4 MFC set to  0.000000
7/14/2011	5:34:30 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	5:34:30 PM	Tube furnace set to 1000
7/14/2011	5:54:30 PM	Helium valve closed
7/14/2011	5:54:30 PM	PH3 valve closed
7/14/2011	5:54:30 PM	Main Vac valve closed
7/14/2011	5:54:30 PM	Bypass valve closed
7/14/2011	5:54:30 PM	H2 valve opened
7/14/2011	5:54:30 PM	BCl3 valve opened
7/14/2011	5:54:30 PM	SiCl4 pre valve opened
7/14/2011	5:54:30 PM	SiCl4 post valve opened
7/14/2011	5:54:30 PM	Bubbler valve opened
7/14/2011	5:54:30 PM	Helium MFC set to  0.000000
7/14/2011	5:54:30 PM	H2 MFC set to  500.000000
7/14/2011	5:54:30 PM	BCl3 MFC set to  1.000000
7/14/2011	5:54:30 PM	PHl3 MFC set to  0.000000
7/14/2011	5:54:30 PM	SiCl4 MFC set to  50.000000
7/14/2011	5:54:30 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	5:54:30 PM	Tube furnace set to 1000
7/14/2011	6:14:30 PM	Helium valve closed
7/14/2011	6:14:30 PM	BCl3 valve closed
7/14/2011	6:14:30 PM	PH3 valve closed
7/14/2011	6:14:30 PM	SiCl4 pre valve closed
7/14/2011	6:14:30 PM	SiCl4 post valve closed
7/14/2011	6:14:30 PM	Main Vac valve closed
7/14/2011	6:14:30 PM	Bypass valve closed
7/14/2011	6:14:30 PM	H2 valve opened
7/14/2011	6:14:30 PM	Bubbler valve opened
7/14/2011	6:14:30 PM	Helium MFC set to  0.000000
7/14/2011	6:14:30 PM	H2 MFC set to  500.000000
7/14/2011	6:14:30 PM	BCl3 MFC set to  0.000000
7/14/2011	6:14:30 PM	PHl3 MFC set to  0.000000
7/14/2011	6:14:30 PM	SiCl4 MFC set to  0.000000
7/14/2011	6:14:30 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	6:14:30 PM	Tube furnace set to 950
7/14/2011	6:17:30 PM	H2 valve closed
7/14/2011	6:17:30 PM	BCl3 valve closed
7/14/2011	6:17:30 PM	PH3 valve closed
7/14/2011	6:17:30 PM	SiCl4 pre valve closed
7/14/2011	6:17:30 PM	SiCl4 post valve closed
7/14/2011	6:17:30 PM	Main Vac valve closed
7/14/2011	6:17:30 PM	Bypass valve closed
7/14/2011	6:17:30 PM	Helium valve opened
7/14/2011	6:17:30 PM	Bubbler valve opened
7/14/2011	6:17:30 PM	Helium MFC set to  500.000000
7/14/2011	6:17:30 PM	H2 MFC set to  0.000000
7/14/2011	6:17:30 PM	BCl3 MFC set to  0.000000
7/14/2011	6:17:30 PM	PHl3 MFC set to  0.000000
7/14/2011	6:17:30 PM	SiCl4 MFC set to  0.000000
7/14/2011	6:17:30 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	6:17:30 PM	Tube furnace set to 900
7/14/2011	6:20:30 PM	H2 valve closed
7/14/2011	6:20:30 PM	BCl3 valve closed
7/14/2011	6:20:30 PM	PH3 valve closed
7/14/2011	6:20:30 PM	SiCl4 pre valve closed
7/14/2011	6:20:30 PM	SiCl4 post valve closed
7/14/2011	6:20:30 PM	Main Vac valve closed
7/14/2011	6:20:30 PM	Bypass valve closed
7/14/2011	6:20:30 PM	Helium valve opened
7/14/2011	6:20:30 PM	Bubbler valve opened
7/14/2011	6:20:30 PM	Helium MFC set to  500.000000
7/14/2011	6:20:30 PM	H2 MFC set to  0.000000
7/14/2011	6:20:30 PM	BCl3 MFC set to  0.000000
7/14/2011	6:20:30 PM	PHl3 MFC set to  0.000000
7/14/2011	6:20:30 PM	SiCl4 MFC set to  0.000000
7/14/2011	6:20:30 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	6:20:31 PM	Tube furnace set to 850
7/14/2011	6:23:31 PM	H2 valve closed
7/14/2011	6:23:31 PM	BCl3 valve closed
7/14/2011	6:23:31 PM	PH3 valve closed
7/14/2011	6:23:31 PM	SiCl4 pre valve closed
7/14/2011	6:23:31 PM	SiCl4 post valve closed
7/14/2011	6:23:31 PM	Main Vac valve closed
7/14/2011	6:23:31 PM	Bypass valve closed
7/14/2011	6:23:31 PM	Helium valve opened
7/14/2011	6:23:31 PM	Bubbler valve opened
7/14/2011	6:23:31 PM	Helium MFC set to  500.000000
7/14/2011	6:23:31 PM	H2 MFC set to  0.000000
7/14/2011	6:23:31 PM	BCl3 MFC set to  0.000000
7/14/2011	6:23:31 PM	PHl3 MFC set to  0.000000
7/14/2011	6:23:31 PM	SiCl4 MFC set to  0.000000
7/14/2011	6:23:31 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	6:23:31 PM	Tube furnace set to 800
7/14/2011	6:26:31 PM	H2 valve closed
7/14/2011	6:26:31 PM	BCl3 valve closed
7/14/2011	6:26:31 PM	PH3 valve closed
7/14/2011	6:26:31 PM	SiCl4 pre valve closed
7/14/2011	6:26:31 PM	SiCl4 post valve closed
7/14/2011	6:26:31 PM	Main Vac valve closed
7/14/2011	6:26:31 PM	Bypass valve closed
7/14/2011	6:26:31 PM	Helium valve opened
7/14/2011	6:26:31 PM	Bubbler valve opened
7/14/2011	6:26:31 PM	Helium MFC set to  500.000000
7/14/2011	6:26:31 PM	H2 MFC set to  0.000000
7/14/2011	6:26:31 PM	BCl3 MFC set to  0.000000
7/14/2011	6:26:31 PM	PHl3 MFC set to  0.000000
7/14/2011	6:26:31 PM	SiCl4 MFC set to  0.000000
7/14/2011	6:26:31 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	6:26:31 PM	Tube furnace set to 750
7/14/2011	6:29:31 PM	H2 valve closed
7/14/2011	6:29:31 PM	BCl3 valve closed
7/14/2011	6:29:31 PM	PH3 valve closed
7/14/2011	6:29:31 PM	SiCl4 pre valve closed
7/14/2011	6:29:31 PM	SiCl4 post valve closed
7/14/2011	6:29:31 PM	Main Vac valve closed
7/14/2011	6:29:31 PM	Bypass valve closed
7/14/2011	6:29:31 PM	Helium valve opened
7/14/2011	6:29:31 PM	Bubbler valve opened
7/14/2011	6:29:31 PM	Helium MFC set to  500.000000
7/14/2011	6:29:31 PM	H2 MFC set to  0.000000
7/14/2011	6:29:31 PM	BCl3 MFC set to  0.000000
7/14/2011	6:29:31 PM	PHl3 MFC set to  0.000000
7/14/2011	6:29:31 PM	SiCl4 MFC set to  0.000000
7/14/2011	6:29:31 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	6:29:31 PM	Tube furnace set to 0
7/14/2011	6:49:31 PM	Helium valve closed
7/14/2011	6:49:31 PM	H2 valve closed
7/14/2011	6:49:31 PM	BCl3 valve closed
7/14/2011	6:49:31 PM	PH3 valve closed
7/14/2011	6:49:31 PM	SiCl4 pre valve closed
7/14/2011	6:49:31 PM	SiCl4 post valve closed
7/14/2011	6:49:31 PM	Main Vac valve closed
7/14/2011	6:49:31 PM	Bypass valve closed
7/14/2011	6:49:31 PM	Bubbler valve closed
7/14/2011	6:49:31 PM	Helium MFC set to  0.000000
7/14/2011	6:49:31 PM	H2 MFC set to  0.000000
7/14/2011	6:49:31 PM	BCl3 MFC set to  0.000000
7/14/2011	6:49:31 PM	PHl3 MFC set to  0.000000
7/14/2011	6:49:31 PM	SiCl4 MFC set to  0.000000
7/14/2011	6:49:31 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	6:49:31 PM	Tube furnace set to 0
7/14/2011	6:49:32 PM	Run finished at 6:49 PM
7/14/2011	6:56:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2011	6:57:00 PM	Recipe started at 6:56 PM
7/14/2011	6:57:00 PM	Helium valve closed
7/14/2011	6:57:00 PM	H2 valve closed
7/14/2011	6:57:00 PM	BCl3 valve closed
7/14/2011	6:57:00 PM	PH3 valve closed
7/14/2011	6:57:00 PM	SiCl4 pre valve closed
7/14/2011	6:57:00 PM	SiCl4 post valve closed
7/14/2011	6:57:00 PM	Main Vac valve closed
7/14/2011	6:57:00 PM	Bubbler valve closed
7/14/2011	6:57:00 PM	Bypass valve opened
7/14/2011	6:57:00 PM	Helium MFC set to  0.000000
7/14/2011	6:57:00 PM	H2 MFC set to  0.000000
7/14/2011	6:57:00 PM	BCl3 MFC set to  0.000000
7/14/2011	6:57:00 PM	PHl3 MFC set to  0.000000
7/14/2011	6:57:00 PM	SiCl4 MFC set to  0.000000
7/14/2011	6:57:00 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	6:57:00 PM	Tube furnace set to 0
7/14/2011	6:58:01 PM	Helium valve closed
7/14/2011	6:58:01 PM	H2 valve closed
7/14/2011	6:58:01 PM	BCl3 valve closed
7/14/2011	6:58:01 PM	PH3 valve closed
7/14/2011	6:58:01 PM	SiCl4 pre valve closed
7/14/2011	6:58:01 PM	SiCl4 post valve closed
7/14/2011	6:58:01 PM	Main Vac valve closed
7/14/2011	6:58:01 PM	Bubbler valve closed
7/14/2011	6:58:01 PM	Bypass valve opened
7/14/2011	6:58:01 PM	Helium MFC set to  0.000000
7/14/2011	6:58:01 PM	H2 MFC set to  0.000000
7/14/2011	6:58:01 PM	BCl3 MFC set to  0.000000
7/14/2011	6:58:01 PM	PHl3 MFC set to  0.000000
7/14/2011	6:58:01 PM	SiCl4 MFC set to  0.000000
7/14/2011	6:58:01 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	6:58:01 PM	Tube furnace set to 0
7/14/2011	6:59:01 PM	Helium valve closed
7/14/2011	6:59:01 PM	H2 valve closed
7/14/2011	6:59:01 PM	BCl3 valve closed
7/14/2011	6:59:01 PM	PH3 valve closed
7/14/2011	6:59:01 PM	SiCl4 pre valve closed
7/14/2011	6:59:01 PM	SiCl4 post valve closed
7/14/2011	6:59:01 PM	Bypass valve closed
7/14/2011	6:59:01 PM	Bubbler valve closed
7/14/2011	6:59:01 PM	Main Vac valve opened
7/14/2011	6:59:01 PM	Helium MFC set to  0.000000
7/14/2011	6:59:01 PM	H2 MFC set to  0.000000
7/14/2011	6:59:01 PM	BCl3 MFC set to  0.000000
7/14/2011	6:59:01 PM	PHl3 MFC set to  0.000000
7/14/2011	6:59:01 PM	SiCl4 MFC set to  0.000000
7/14/2011	6:59:01 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	6:59:01 PM	Tube furnace set to 0
7/14/2011	6:59:02 PM	Run finished at 6:59 PM
7/14/2011	6:59:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2011	7:00:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/14/2011	7:00:19 PM	Recipe started at 7:00 PM
7/14/2011	7:00:19 PM	Helium valve closed
7/14/2011	7:00:19 PM	H2 valve closed
7/14/2011	7:00:19 PM	BCl3 valve closed
7/14/2011	7:00:19 PM	PH3 valve closed
7/14/2011	7:00:19 PM	SiCl4 pre valve closed
7/14/2011	7:00:19 PM	SiCl4 post valve closed
7/14/2011	7:00:19 PM	Main Vac valve closed
7/14/2011	7:00:19 PM	Bypass valve closed
7/14/2011	7:00:19 PM	Bubbler valve closed
7/14/2011	7:00:19 PM	Helium MFC set to  0.000000
7/14/2011	7:00:19 PM	H2 MFC set to  0.000000
7/14/2011	7:00:19 PM	BCl3 MFC set to  0.000000
7/14/2011	7:00:19 PM	PHl3 MFC set to  0.000000
7/14/2011	7:00:19 PM	SiCl4 MFC set to  0.000000
7/14/2011	7:00:19 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	7:00:19 PM	Tube furnace set to 0
7/14/2011	7:00:20 PM	Run aborted at 7:00 PM
7/14/2011	7:00:20 PM	Helium valve closed
7/14/2011	7:00:20 PM	H2 valve closed
7/14/2011	7:00:20 PM	BCl3 valve closed
7/14/2011	7:00:20 PM	PH3 valve closed
7/14/2011	7:00:20 PM	SiCl4 pre valve closed
7/14/2011	7:00:20 PM	SiCl4 post valve closed
7/14/2011	7:00:20 PM	Bypass valve closed
7/14/2011	7:00:20 PM	Main Vac valve closed
7/14/2011	7:00:20 PM	Bubbler valve closed
7/14/2011	7:00:20 PM	Helium MFC set to  0.000000
7/14/2011	7:00:20 PM	H2 MFC set to  0.000000
7/14/2011	7:00:20 PM	BCl3 MFC set to  0.000000
7/14/2011	7:00:20 PM	PHl3 MFC set to  0.000000
7/14/2011	7:00:20 PM	SiCl4 MFC set to  0.000000
7/14/2011	7:00:20 PM	Tube furnace set to 0
7/14/2011	7:00:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/14/2011	7:00:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2011	7:00:24 PM	Recipe started at 7:00 PM
7/14/2011	7:00:24 PM	Helium valve closed
7/14/2011	7:00:24 PM	H2 valve closed
7/14/2011	7:00:24 PM	BCl3 valve closed
7/14/2011	7:00:24 PM	PH3 valve closed
7/14/2011	7:00:24 PM	SiCl4 pre valve closed
7/14/2011	7:00:24 PM	SiCl4 post valve closed
7/14/2011	7:00:24 PM	Main Vac valve closed
7/14/2011	7:00:24 PM	Bubbler valve closed
7/14/2011	7:00:24 PM	Bypass valve opened
7/14/2011	7:00:24 PM	Helium MFC set to  0.000000
7/14/2011	7:00:24 PM	H2 MFC set to  0.000000
7/14/2011	7:00:24 PM	BCl3 MFC set to  0.000000
7/14/2011	7:00:24 PM	PHl3 MFC set to  0.000000
7/14/2011	7:00:24 PM	SiCl4 MFC set to  0.000000
7/14/2011	7:00:24 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	7:00:24 PM	Tube furnace set to 0
7/14/2011	7:00:25 PM	Helium valve closed
7/14/2011	7:00:25 PM	H2 valve closed
7/14/2011	7:00:25 PM	BCl3 valve closed
7/14/2011	7:00:25 PM	PH3 valve closed
7/14/2011	7:00:25 PM	SiCl4 pre valve closed
7/14/2011	7:00:25 PM	SiCl4 post valve closed
7/14/2011	7:00:25 PM	Main Vac valve closed
7/14/2011	7:00:25 PM	Bubbler valve closed
7/14/2011	7:00:25 PM	Bypass valve opened
7/14/2011	7:00:25 PM	Helium MFC set to  0.000000
7/14/2011	7:00:25 PM	H2 MFC set to  0.000000
7/14/2011	7:00:25 PM	BCl3 MFC set to  0.000000
7/14/2011	7:00:25 PM	PHl3 MFC set to  0.000000
7/14/2011	7:00:25 PM	SiCl4 MFC set to  0.000000
7/14/2011	7:00:25 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	7:00:25 PM	Tube furnace set to 0
7/14/2011	7:00:32 PM	Helium valve closed
7/14/2011	7:00:32 PM	H2 valve closed
7/14/2011	7:00:32 PM	BCl3 valve closed
7/14/2011	7:00:32 PM	PH3 valve closed
7/14/2011	7:00:32 PM	SiCl4 pre valve closed
7/14/2011	7:00:32 PM	SiCl4 post valve closed
7/14/2011	7:00:32 PM	Bypass valve closed
7/14/2011	7:00:32 PM	Bubbler valve closed
7/14/2011	7:00:32 PM	Main Vac valve opened
7/14/2011	7:00:32 PM	Helium MFC set to  0.000000
7/14/2011	7:00:32 PM	H2 MFC set to  0.000000
7/14/2011	7:00:32 PM	BCl3 MFC set to  0.000000
7/14/2011	7:00:32 PM	PHl3 MFC set to  0.000000
7/14/2011	7:00:32 PM	SiCl4 MFC set to  0.000000
7/14/2011	7:00:32 PM	Bypass solenoid MFC set to  0.000000
7/14/2011	7:00:32 PM	Tube furnace set to 0
7/14/2011	7:00:33 PM	Run finished at 7:00 PM
7/14/2011	7:00:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/14/2011	7:00:40 PM	Helium MFC set to  20.000000
7/14/2011	7:00:42 PM	Helium valve opened
7/14/2011	7:00:48 PM	Helium valve closed
7/14/2011	7:01:00 PM	Helium valve opened
7/14/2011	7:01:14 PM	Helium valve closed
7/14/2011	7:01:36 PM	Helium valve opened
7/14/2011	7:02:40 PM	Helium valve closed
7/14/2011	7:04:05 PM	Helium valve opened
7/14/2011	7:04:51 PM	Helium valve closed
